Program
The 5-day School is divided in an Introductory day and 3 days of Lectures by internationally renowned experts in the field. The fifth day will provide hands-on-experience on defect spectroscopy and
modeling. PhD student participants are encouraged to make a poster to present and discuss their research.
The introductory tutorial day covers the following topics:
Defects in semiconductors: basic definitions and structural and electrical properties
Defect characterization techniques
Basics of semiconductor devices
Basics semiconductor processing steps
The Lectures include:
Defects in substrates and epitaxial layers
Processing-induced defects and defect engineering
Interface and bulk defects – impact on devices
Impact defects on electrical performance and yield
Day 1: Monday 10 September: Tutorials
Day 2: Tuesday 11 September: Defects in substrates and Epitaxial Layers
Day 3: Wednesday 12 September: Processing-induced defects and Defect Engineering
Day 4: Thursday 13 September: Interface and Bulk Defects – Defect Modeling
Day 5: Friday 14 September: Hands-on practical day (H. Vrielinck, E. Simoen, J. Lauwaert).
Detailed program days on left